Materials

Graphite, refractory metals, ceramics and engineering plastics are widely used in industries such as semiconductors and optoelectronic panels. We have many years of experience in the development of ion implanter materials and can provide high-purity and high-quality processing materials. In addition to providing basic standard machinery products, we can also provide various types of customized products and technical services, which can be widely adopted in various fields and high-end process requirements.

In addition to the standard consumables for the machine, in response to the continuous improvement of semiconductor manufacturing process, we also work with customers to research and develop the application of new alternative materials. For example, as the semiconductor manufacturing process becomes more and more refined, the particle requirements on the semiconductor wafer will also become more and more stringent. We can work with customers to study whether there are other materials that are more resistant to impact in the face of ion beams, have features of wear resistance, able to reduce the release of particles into the cavity and further reduce the risk of contacting the wafers. Keep moving on with customers to reach a win-win situation.